Atomic Layer Deposition
Self-limiting surface reactions for conformal thin films at the atomic scale.
Atomic Layer Deposition — Self-limiting surface reactions for conformal thin films at the atomic scale. This page is a placeholder while frontier-paper sourcing is deferred to a follow-up OpenAlex wave.
The topic sits in the Charted science tree as a child of chemistry/surface-and-interface-chemistry and will be expanded once curated primary sources have been gathered. A foundational reference for this area is Introduction to Surface Chemistry and Catalysis (Somorjai and Li, 2010).
Prerequisites
Sources
- textbook · primary · 2010Introduction to Surface Chemistry and Catalysissomorjai-2010, li-yimin-2010
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